In-Situ Interferometer (ISI)®
Measures lens aberrations and phase error versus slit position

Source Metrology Instrument (SMI)®
Measures Illuminator Profile versus slit position

Transmission Mapper (TMAP)®
Measures lens NA and Transmission at the Exit Pupil

Distortion Mapper (DMAP)®
Measures image distortion and separates the lens and stage components

Z-Height Mapper (ZMAP)
Measures focus variation