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Litel Instruments

Technical Papers

ISI
Lens Aberrations

SMI
Source Profile

TMAP
NA / Transmission

DMAP
Distortion / Overlay

Technical Papers
Case Studies
Applications

Measurement, Separation, and Amelioration of Transverse Scanning Synchronization Error

Writer: Yuji Yamaguchi, Ranjan Khurana, Adlai H. Smith, Venky Subramony, Calvin Chen Chii Wean, Joseph J. Bendik
Conference: SPIE 2006
Related Products: DMAP

Abnormal Patterning Analysis Using Actual Lens and Illumination Source Data

Writer: Jongkyun Hong, Jeonkyu Lee, Eunsuk Kang, Hyunjo Yang, Donggyu Yim, James Guerrero, Rob Chung
Conference: SPIE 2005
Related Products: ISI, SMI, DMAP, TMAP, MPACE

A Simulation Performance Framework Using In-Situ Metrology

Writer: Joseph J. Bendik, Yuji Yamaguchi, Lyle G. Finkner, Adlai H. Smith
Conference: SPIE 2005
Related Products: ISI, DMIL (DMAP), DIMS (DMAP), TMAP, HA-SMI, TMAP, MPACE

Application of In-Situ Aberration Measurements to Pattern-Specific Imaging Optimization

Writer: Steven D. Slonaker, Robert J. Chung
Conference: SPIE 2003
Related Products: ISI

Behavior of Lens Aberrations as a Function of Wavelength on KrF and ArF Lithography Scanners

Writer: Mark Terry, Ivan Lalovic, Greg Wells, Adlai Smith
Conference: SPIE 2001
Related Products: ISI

Gauging The Performance Of An In-situ Interferometer

Writer: Mark Terry, Adlai Smith, and Ken Rebitz
Conference: SPIE 2000
Related Products: ISI

Review of Photoresist Based Lens Evaluation

Writer: Joseph P. Kirk
Conference: SPIE 2000
Related Products: ISI

In-Situ Measurement of Lens Aberrations

Writer: Nigel R. Farrar, Adlai L. Smith, Dan Busath, Dennis Taitano
Conference: SPIE 2000
Related Products: ISI

Measurement of Lens Aberration by Using In-Situ Interferometer and Classification of Lens for Correct Application

Writer: Nakgeuon Seong, Geesung Yeo, Hanku Cho, Jootae Moon
Conference: SPIE 2000
Related Products: ISI

Understanding Lens Aberration and Influences to Lithographic Imaging

Writer: Bruce W. Smith and Ralph Schlief
Conference: SPIE 2000
Related Products: ISI

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