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Litel Instruments         
  Products
ISI
Lens Aberrations

SMI
Source Profile

TMAP
NA / Transmission

DMAP
Distortion / Overlay


Technical Papers
Case Studies
Applications

Litel products provide full independent analyses of essential photolithography components such as the projection lens, illuminator, and stages. Understanding, controlling, and designing around this information is necessary to obtain high yields of leading edge products.

Single Field Point Lens Aberrations

InspecStep Interferometer (ISI)®

Measures lens aberrations and phase error vs. slit position

Single Field Point Source Profile

Source Metrology Instrument (SMI)®

Measures source profile vs. slit position information

Single Field Point Transmission Profile

Transmission Mapper (TMAP)™

Measures lens NA and transmission at the exit pupil of the main lens

Single Field Point a2/a3 Tilt

Distortion Mapper (DMAP)®

Measures image distortion and separates the lens and stage components

All Litel Products are based on the standard reticle form factor and:

  • Use resist based technology
  • Have a Quick turnaround - requires less than 15 minutes of scanner overhead time, total cycle time offline less than 4 hours
  • All products can be used on any OEM platform or any generation lithography tool
  • Are self-referenced; require no outside standards
  • Are factory calibrated; require no further calibration in the field
  • Products can be used with ultra high NA and with immersion technologies